Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848226 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2023-12-19 |
| 11842907 | Spot heating by moving a beam with horizontal rotary motion | Shu-Kwan LAU, Toshiyuki Nakagawa | 2023-12-12 |
| 11821088 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Joseph M. Ranish +3 more | 2023-11-21 |
| 11781212 | Overlap susceptor and preheat ring | Zhepeng CONG, Schubert S. Chu, Nyi O. Myo, Kartik Shah, Richard O. Collins | 2023-10-10 |
| 11733081 | Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system | Bindusagar Marath Sankarathodi, Jyothi RAJEEVAN, Ala Moradian, Zuoming ZHU, Errol Antonio C. Sanchez +1 more | 2023-08-22 |
| 11680338 | Linear lamp array for improved thermal uniformity and profile control | Brian H. Burrows, Shu-Kwan LAU | 2023-06-20 |
| 11604089 | Mass flow verification based on rate of pressure decay | Justin Hough, Marcel E. Josephson | 2023-03-14 |