Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848226 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2023-12-19 |
| 11821088 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2023-11-21 |
| 11815401 | Temperature calibration with band gap absorption method | Zhepeng CONG, Schubert S. Chu | 2023-11-14 |
| 11807931 | Chamber injector | Shu-Kwan LAU, Lit Ping LAM, Preetham Rao, Kartik Shah, Ian Ong +1 more | 2023-11-07 |
| 11781212 | Overlap susceptor and preheat ring | Zhepeng CONG, Schubert S. Chu, Kartik Shah, Zhiyuan Ye, Richard O. Collins | 2023-10-10 |