Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848226 | Thermal processing susceptor | Anhthu Ngo, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong, Anzhong Chang +10 more | 2023-12-19 |
| 11821088 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zhiyuan Ye, Joseph M. Ranish +3 more | 2023-11-21 |
| 11733081 | Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system | Bindusagar Marath Sankarathodi, Zhiyuan Ye, Jyothi RAJEEVAN, Ala Moradian, Errol Antonio C. Sanchez +1 more | 2023-08-22 |