Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842907 | Spot heating by moving a beam with horizontal rotary motion | Shu-Kwan LAU, Zhiyuan Ye | 2023-12-12 |
| 11819838 | Precursor supply system and precursors supply method | Kouki Morimoto, Kazutaka Yanagita, Takashi Kameoka, Yuki Kumamoto, Kazuma SUZUKI +1 more | 2023-11-21 |
| 11821088 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Zuoming ZHU, Zhiyuan Ye, Joseph M. Ranish +3 more | 2023-11-21 |
| 11594445 | Support ring with plasma spray coating | Jian Wu, Koji Nakanishi | 2023-02-28 |
| 11582666 | Communication apparatus, control method of communication apparatus, and computer-readable storage medium | — | 2023-02-14 |
| 11561618 | Information processing device, information processing method, and program | Hirofumi Takeda, Shuichiro Nishigori, Shiro Suzuki, Jun Matsumoto, Ikuo Yamano | 2023-01-24 |