Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11819838 | Precursor supply system and precursors supply method | Toshiyuki Nakagawa, Kouki Morimoto, Kazutaka Yanagita, Yuki Kumamoto, Kazuma SUZUKI +1 more | 2023-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11819838 | Precursor supply system and precursors supply method | Toshiyuki Nakagawa, Kouki Morimoto, Kazutaka Yanagita, Yuki Kumamoto, Kazuma SUZUKI +1 more | 2023-11-21 |