Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842907 | Spot heating by moving a beam with horizontal rotary motion | Toshiyuki Nakagawa, Zhiyuan Ye | 2023-12-12 |
| 11821088 | Multi zone spot heating in EPI | Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye, Joseph M. Ranish +3 more | 2023-11-21 |
| 11807931 | Chamber injector | Lit Ping LAM, Preetham Rao, Kartik Shah, Ian Ong, Nyi O. Myo +1 more | 2023-11-07 |
| 11680338 | Linear lamp array for improved thermal uniformity and profile control | Brian H. Burrows, Zhiyuan Ye | 2023-06-20 |