Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11807931 | Chamber injector | Shu-Kwan LAU, Lit Ping LAM, Preetham Rao, Kartik Shah, Ian Ong +1 more | 2023-11-07 |
| 11680338 | Linear lamp array for improved thermal uniformity and profile control | Shu-Kwan LAU, Zhiyuan Ye | 2023-06-20 |
| 11578004 | Methods and apparatus for depositing materials on a continuous substrate | David Masayuki Ishikawa | 2023-02-14 |