Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11807931 | Chamber injector | Shu-Kwan LAU, Lit Ping LAM, Kartik Shah, Ian Ong, Nyi O. Myo +1 more | 2023-11-07 |
| 11670525 | Methods and apparatus for microwave leakage reduction for semiconductor process chambers | Ananthkrishna Jupudi, Ribhu Gautam | 2023-06-06 |
| 11629409 | Inline microwave batch degas chamber | Ribhu Gautam, Ananthkrishna Jupudi, Tuck Foong Koh, Vinodh Ramachandran, Yueh Sheng Ow +3 more | 2023-04-18 |