Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784075 | Batch substrate support with warped substrate capability | Shashidhara Patel, Ananthkrishna Jupudi | 2023-10-10 |
| 11767484 | Bio-lubricant with high viscosity and method | Tsu-fang HONG, Subram Maniam SARATHY | 2023-09-26 |
| 11699634 | Water cooled plate for heat management in power amplifiers | Ananthkrishna Jupudi, Vinodh Ramachandran | 2023-07-11 |
| 11670525 | Methods and apparatus for microwave leakage reduction for semiconductor process chambers | Preetham Rao, Ananthkrishna Jupudi | 2023-06-06 |
| 11629409 | Inline microwave batch degas chamber | Ananthkrishna Jupudi, Tuck Foong Koh, Preetham Rao, Vinodh Ramachandran, Yueh Sheng Ow +3 more | 2023-04-18 |