Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784075 | Batch substrate support with warped substrate capability | Shashidhara Patel, Ribhu Gautam | 2023-10-10 |
| 11699634 | Water cooled plate for heat management in power amplifiers | Ribhu Gautam, Vinodh Ramachandran | 2023-07-11 |
| 11670513 | Apparatus and systems for substrate processing for lowering contact resistance | Yueh Sheng Ow, Junqi Wei, Wen Long Favier Shoo, Takashi Shimizu, Kelvin Boh +1 more | 2023-06-06 |
| 11670525 | Methods and apparatus for microwave leakage reduction for semiconductor process chambers | Preetham Rao, Ribhu Gautam | 2023-06-06 |
| 11629409 | Inline microwave batch degas chamber | Ribhu Gautam, Tuck Foong Koh, Preetham Rao, Vinodh Ramachandran, Yueh Sheng Ow +3 more | 2023-04-18 |
| 11630001 | Apparatus for measuring temperature in a vacuum and microwave environment | Sai Kumar Kodumuri, Vinodh Ramachandran, Prashant Agarwal, Hadi Bin Amir Muhammad | 2023-04-18 |