Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670513 | Apparatus and systems for substrate processing for lowering contact resistance | Yueh Sheng Ow, Junqi Wei, Wen Long Favier Shoo, Ananthkrishna Jupudi, Takashi Shimizu +1 more | 2023-06-06 |
| 11629409 | Inline microwave batch degas chamber | Ribhu Gautam, Ananthkrishna Jupudi, Preetham Rao, Vinodh Ramachandran, Yueh Sheng Ow +3 more | 2023-04-18 |
| 11610807 | Methods and apparatus for cleaving of semiconductor substrates | Felix Deng, Yueh Sheng Ow, Nuno Yen-Chu Chen, Yuichi Wada, Sree Rangasai V. Kesapragada +1 more | 2023-03-21 |
| 11569122 | Methods and apparatus for cleaving of semiconductor substrates | Felix Deng, Yueh Sheng Ow, Nuno Yen-Chu Chen, Yuichi Wada, Sree Rangasai V. Kesapragada +1 more | 2023-01-31 |