Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821088 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2023-11-21 |
| 11662253 | Method and apparatus for measuring temperature | — | 2023-05-30 |
| 11646218 | Sol gel coated support ring | — | 2023-05-09 |