Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821088 | Multi zone spot heating in EPI | Shu-Kwan LAU, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye, Joseph M. Ranish +3 more | 2023-11-21 |
| 11594445 | Support ring with plasma spray coating | Jian Wu, Toshiyuki Nakagawa | 2023-02-28 |