Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821088 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2023-11-21 |
| 11733081 | Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system | Bindusagar Marath Sankarathodi, Zhiyuan Ye, Jyothi RAJEEVAN, Ala Moradian, Zuoming ZHU +1 more | 2023-08-22 |
| 11649560 | Method for forming silicon-phosphorous materials | Mark Saly, Schubert S. Chu, Abhishek Dube, Srividya Natarajan | 2023-05-16 |