Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846011 | Lid stack for high frequency processing | Shuran Sheng, Lin Zhang | 2023-12-19 |
| 11837448 | High-temperature chamber and chamber component cleaning and maintenance method and apparatus | Shuran Sheng, Lin Zhang, Jiyong Huang, Jang Seok OH, Nitin Khurana +4 more | 2023-12-05 |