Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837448 | High-temperature chamber and chamber component cleaning and maintenance method and apparatus | Shuran Sheng, Lin Zhang, Jiyong Huang, Jang Seok OH, Joseph C. Werner +4 more | 2023-12-05 |
| 11784229 | Profile shaping for control gate recesses | Akhil Singhal, Allison Yau, Sang Jin Kim, Zeqiong Zhao, Deenesh Padhi +1 more | 2023-10-10 |
| 11646216 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Akhil Singhal, Allison Yau, Zeqiong Zhao, Sang Jin Kim, Deenesh Padhi +1 more | 2023-05-09 |
| 11613812 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Juan Carlos Rocha-Alvarez +17 more | 2023-03-28 |