Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784229 | Profile shaping for control gate recesses | Akhil Singhal, Allison Yau, Sang Jin Kim, Zhijun Jiang, Deenesh Padhi +1 more | 2023-10-10 |
| 11646216 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Akhil Singhal, Allison Yau, Sang Jin Kim, Zhijun Jiang, Deenesh Padhi +1 more | 2023-05-09 |
| 11587789 | System and method for radical and thermal processing of substrates | Xinming Zhang, Abhilash J. Mayur, Shashank Sharma, Norman L. Tam, Matthew Spuller | 2023-02-21 |