Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823901 | System and method for radical and thermal processing of substrates | Xinming Zhang, Shashank Sharma, Norman L. Tam, Matthew Spuller | 2023-11-21 |
| 11587789 | System and method for radical and thermal processing of substrates | Xinming Zhang, Shashank Sharma, Norman L. Tam, Matthew Spuller, Zeqiong Zhao | 2023-02-21 |