Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823901 | System and method for radical and thermal processing of substrates | Xinming Zhang, Abhilash J. Mayur, Shashank Sharma, Norman L. Tam | 2023-11-21 |
| 11817297 | System and method for managing substrate outgassing | Dongming Iu | 2023-11-14 |
| 11587789 | System and method for radical and thermal processing of substrates | Xinming Zhang, Abhilash J. Mayur, Shashank Sharma, Norman L. Tam, Zeqiong Zhao | 2023-02-21 |