Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817297 | System and method for managing substrate outgassing | Matthew Spuller | 2023-11-14 |
| 11694919 | Vacuum chuck pressure control system | Mehran Behdjat | 2023-07-04 |
| 11664250 | Methods and apparatus for measuring edge ring temperature | Ji-Dih HU, Wolfgang Aderhold | 2023-05-30 |
| 11562915 | Methods, systems, and apparatus for optically monitoring individual lamps | Ji-Dih HU, Chaitanya A. PRASAD, Samuel C. Howells, Vilen K. NESTOROV | 2023-01-24 |