Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11828656 | Reflector plate for substrate processing | — | 2023-11-28 |
| 11735447 | Enhanced process and hardware architecture to detect and correct realtime product substrates | Kartik Santhanam, Kartik Shah, Martin A. Hilkene, Stephen Moffatt | 2023-08-22 |
| 11664250 | Methods and apparatus for measuring edge ring temperature | Ji-Dih HU, Dongming Iu | 2023-05-30 |