Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664250 | Methods and apparatus for measuring edge ring temperature | Wolfgang Aderhold, Dongming Iu | 2023-05-30 |
| 11562915 | Methods, systems, and apparatus for optically monitoring individual lamps | Chaitanya A. PRASAD, Dongming Iu, Samuel C. Howells, Vilen K. NESTOROV | 2023-01-24 |