Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11710631 | Tensile nitride deposition systems and methods | Yichuen Lin, Kevin Hsiao, Hang Yu, Deenesh Padhi, Yijun Liu +1 more | 2023-07-25 |
| 11699623 | Systems and methods for analyzing defects in CVD films | Mandar B. Pandit, Man-Ping Cai, Wenhui Li, Praket P. Jha, Jingmin Leng | 2023-07-11 |
| 11613812 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Masaki Ogata, Zhijun Jiang, Juan Carlos Rocha-Alvarez +17 more | 2023-03-28 |