Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804372 | CD dependent gap fill and conformal films | Jung Chan Lee, Jingmei Liang, Jinrui GUO, Wenhui Li | 2023-10-31 |
| 11699623 | Systems and methods for analyzing defects in CVD films | Mandar B. Pandit, Man-Ping Cai, Wenhui Li, Michael Wenyoung Tsiang, Jingmin Leng | 2023-07-11 |
| 11615966 | Flowable film formation and treatments | Shishi Jiang, Abhijit Basu Mallick | 2023-03-28 |