Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804372 | CD dependent gap fill and conformal films | Jung Chan Lee, Praket P. Jha, Jingmei Liang, Wenhui Li | 2023-10-31 |
| 11629402 | Atomic layer deposition on optical structures | Ludovic Godet, Rutger Meyer Timmerman Thijssen | 2023-04-18 |
| 11630251 | Mask orientation | Yongan Xu, Rutger Meyer Timmerman Thijssen, Ludovic Godet | 2023-04-18 |
| 11572619 | Method of thin film deposition in trenches | Ludovic Godet, Rutger Meyer Timmerman Thijssen, Yongan Xu, Jhenghan YANG, Chien-An Chen | 2023-02-07 |