Issued Patents 2023
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815823 | Alignment mark for front to back side alignment and lithography for optical device fabrication | Ludovic Godet | 2023-11-14 |
| 11784120 | Metal via structure | Yann Mignot, James J. Kelly, Muthumanickam Sankarapandian, Hsueh-Chung Chen, Daniel J. Vincent | 2023-10-10 |
| 11754919 | Lithography method to form structures with slanted angle | Jinxin FU, Jhenghan YANG, Ludovic Godet | 2023-09-12 |
| 11709423 | Methods of greytone imprint lithography to fabricate optical devices | Hao Tang, Kang Luo, Erica Chen | 2023-07-25 |
| 11699591 | Two-color self-aligned double patterning (SADP) to yield static random access memory (SRAM) and dense logic | Fee Li Lie, Dongbing Shao, Robert C. Wong | 2023-07-11 |
| 11669012 | Maskless lithography method to fabricate topographic substrate | Ludovic Godet | 2023-06-06 |
| 11630251 | Mask orientation | Rutger Meyer Timmerman Thijssen, Jinrui GUO, Ludovic Godet | 2023-04-18 |
| 11610925 | Imaging system and method of creating composite images | Jinxin FU, Ludovic Godet, Naamah ARGAMAN, Robert Jan Visser | 2023-03-21 |
| 11572619 | Method of thin film deposition in trenches | Jinrui GUO, Ludovic Godet, Rutger Meyer Timmerman Thijssen, Jhenghan YANG, Chien-An Chen | 2023-02-07 |
| 11543793 | Developer critical dimension control with pulse development | Richard C. Johnson, Hao Tang | 2023-01-03 |