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Methods and apparatus for minimizing substrate backside damage |
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| 11742185 |
Uniform in situ cleaning and deposition |
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| 11699577 |
Treatment for high-temperature cleans |
Sarah Michelle Bobek, Ruiyun Huang, Amit Kumar BANSAL, Dong-Hyung LEE, Ganesh Balasubramanian +6 more |
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| 11682574 |
Electrostatic chuck design with improved chucking and arcing performance |
Venkata Sharat Chandra Parimi, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Vinay Prabhakar |
2023-06-20 |
| 11674222 |
Method of in situ ceramic coating deposition |
Sarah Michelle Bobek, Ratsamee Limdulpaiboon, Kwangduk Douglas Lee |
2023-06-13 |
| 11670492 |
Chamber configurations and processes for particle control |
Fei Wu, Sungwon Ha, Ganesh Balasubramanian, Vinay Prabhakar |
2023-06-06 |
| 11613808 |
Clean processes for boron carbon film deposition |
Jiheng Zhao, Prashant Kumar Kulshreshtha, Fang Ruan |
2023-03-28 |
| 11569072 |
RF grounding configuration for pedestals |
Satya THOKACHICHU, Edward P. Hammond, IV, Viren Kalsekar, Zheng John Ye, Vinay Prabhakar |
2023-01-31 |
| 11560623 |
Methods of reducing chamber residues |
Liangfa Hu, Prashant Kumar Kulshreshtha, Anjana M. Patel, Viren Kalsekar, Vinay Prabhakar +5 more |
2023-01-24 |
