Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764101 | Susceptor for semiconductor substrate processing | Shiva K.T. Rajavelu Muralidhar, Siyao Luan, Alexandros T. Demos, Xing Lin | 2023-09-19 |
| 11742185 | Uniform in situ cleaning and deposition | Tuan Nguyen, Amit Kumar BANSAL, Yuxing Zhang, Badri Narayan Ramamurthi, Nitin Pathak +2 more | 2023-08-29 |
| 11697877 | High temperature face plate for deposition application | Amit Kumar BANSAL, Tuan Nguyen | 2023-07-11 |