Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827980 | Isolator apparatus and methods for substrate processing chambers | Amit Kumar BANSAL, Tuan Nguyen, Thomas Rubio, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez | 2023-11-28 |
| 11742185 | Uniform in situ cleaning and deposition | Saket Rathi, Tuan Nguyen, Amit Kumar BANSAL, Yuxing Zhang, Badri Narayan Ramamurthi +2 more | 2023-08-29 |
| 11643725 | Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater | Tuan Nguyen, Amit Kumar BANSAL, Badri Narayan Ramamurthi, Thomas Rubio, Juan Carlos Rocha-Alvarez | 2023-05-09 |