Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827980 | Isolator apparatus and methods for substrate processing chambers | Nitin Pathak, Amit Kumar BANSAL, Tuan Nguyen, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez | 2023-11-28 |
| 11643725 | Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater | Nitin Pathak, Tuan Nguyen, Amit Kumar BANSAL, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez | 2023-05-09 |