Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569072 | RF grounding configuration for pedestals | Edward P. Hammond, IV, Viren Kalsekar, Zheng John Ye, Abdul Aziz Khaja, Vinay Prabhakar | 2023-01-31 |
| 11560623 | Methods of reducing chamber residues | Liangfa Hu, Prashant Kumar Kulshreshtha, Anjana M. Patel, Abdul Aziz Khaja, Viren Kalsekar +5 more | 2023-01-24 |