| 11830706 |
Heated pedestal design for improved heat transfer and temperature uniformity |
Venkata Sharat Chandra Parimi, Zubin Huang, Jian Li, Satish Radhakrishnan, Rui Cheng +7 more |
2023-11-28 |
| 11821082 |
Reduced defect deposition processes |
Xiaoquan Min, Byung Ik Song, Hyung Je Woo, Venkata Sharat Chandra Parimi, Kwangduk Douglas Lee |
2023-11-21 |
| 11814716 |
Faceplate having blocked center hole |
Fang Ruan, Jiheng Zhao, Diwakar Kedlaya |
2023-11-14 |
| 11810764 |
Faceplate with edge flow control |
Fang Ruan, Rajaram Narayanan, Diwakar Kedlaya |
2023-11-07 |
| 11756819 |
Methods and apparatus for minimizing substrate backside damage |
Liangfa Hu, Abdul Aziz Khaja, Sarah Michelle Bobek, Yoichi Suzuki |
2023-09-12 |
| 11728168 |
Ultra-high modulus and etch selectivity boron-carbon hardmask films |
Ziqing Duan, Karthik Thimmavajjula Narasimha, Kwangduk Douglas Lee, Bok Hoen Kim |
2023-08-15 |
| 11682574 |
Electrostatic chuck design with improved chucking and arcing performance |
Abdul Aziz Khaja, Venkata Sharat Chandra Parimi, Sarah Michelle Bobek, Vinay Prabhakar |
2023-06-20 |
| 11613808 |
Clean processes for boron carbon film deposition |
Jiheng Zhao, Abdul Aziz Khaja, Fang Ruan |
2023-03-28 |
| 11600470 |
Targeted heat control systems |
Venkata Sharat Chandra Parimi, Satish Radhakrishnan, Xiaoquan Min, Sarah Michelle Bobek, Sungwon Ha +1 more |
2023-03-07 |
| 11584994 |
Pedestal for substrate processing chambers |
Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Vinay Prabhakar, Kwangduk Douglas Lee, Sungwon Ha +1 more |
2023-02-21 |
| 11560623 |
Methods of reducing chamber residues |
Liangfa Hu, Anjana M. Patel, Abdul Aziz Khaja, Viren Kalsekar, Vinay Prabhakar +5 more |
2023-01-24 |
