Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810764 | Faceplate with edge flow control | Fang Ruan, Prashant Kumar Kulshreshtha, Diwakar Kedlaya | 2023-11-07 |
| 11798820 | Gas delivery systems and methods | Diwakar Kedlaya, Fang Ruan, Zubin Huang, Ganesh Balasubramanian, Kaushik Alayavalli +3 more | 2023-10-24 |