Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699577 | Treatment for high-temperature cleans | Sarah Michelle Bobek, Ruiyun Huang, Abdul Aziz Khaja, Amit Kumar BANSAL, Dong-Hyung LEE +6 more | 2023-07-11 |
| 11670492 | Chamber configurations and processes for particle control | Fei Wu, Abdul Aziz Khaja, Ganesh Balasubramanian, Vinay Prabhakar | 2023-06-06 |
| 11600470 | Targeted heat control systems | Venkata Sharat Chandra Parimi, Satish Radhakrishnan, Xiaoquan Min, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha +1 more | 2023-03-07 |
| 11584994 | Pedestal for substrate processing chambers | Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Kwangduk Douglas Lee +1 more | 2023-02-21 |