Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798820 | Gas delivery systems and methods | Diwakar Kedlaya, Fang Ruan, Zubin Huang, Ganesh Balasubramanian, Kaushik Alayavalli +3 more | 2023-10-24 |
| 11756796 | Techniques for improved low dielectric constant film processing | Rajesh Prasad, Shan Tang, Qi Gao, Deven Raj Mittal, Kyuha Shim | 2023-09-12 |
| 11615984 | Method of dielectric material fill and treatment | Shi YOU, He Ren, Naomi Yoshida, Nikolaos Bekiaris, Mehul Naik +2 more | 2023-03-28 |