Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756796 | Techniques for improved low dielectric constant film processing | Rajesh Prasad, Martin Jay Seamons, Shan Tang, Qi Gao, Deven Raj Mittal | 2023-09-12 |
| 11551904 | System and technique for profile modulation using high tilt angles | Venkataramana R. Chavva, Hans-Joachim L. Gossmann, Edwin Arevalo, Scott Falk, Rajesh Prasad | 2023-01-10 |