Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756796 | Techniques for improved low dielectric constant film processing | Martin Jay Seamons, Shan Tang, Qi Gao, Deven Raj Mittal, Kyuha Shim | 2023-09-12 |
| 11626284 | Method of forming a 2-dimensional channel material, using ion implantation | Keith Tatseun Wong, Hurshvardhan Srivastava, Srinivas D. Nemani, Johannes M. van Meer | 2023-04-11 |
| 11551904 | System and technique for profile modulation using high tilt angles | Venkataramana R. Chavva, Kyuha Shim, Hans-Joachim L. Gossmann, Edwin Arevalo, Scott Falk | 2023-01-10 |