Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830725 | Method of cleaning a structure and method of depositing a capping layer in a structure | Naomi Yoshida, He Ren, Hao Jiang, Chenfei Shen, Chi-Chou Lin +2 more | 2023-11-28 |
| 11776806 | Multi-step pre-clean for selective metal gap fill | Xi Cen, Yakuan Yao, Yiming Lai, Kai Wu, Avgerinos V. Gelatos +8 more | 2023-10-03 |
| 11749532 | Methods and apparatus for processing a substrate | Hao Jiang, Chi-Pin Lu, He Ren | 2023-09-05 |
| 11705366 | Methods for controllable metal and barrier-liner recess | He Ren, Amrita B. Mullick, Regina Freed, Uday Mitra | 2023-07-18 |
| 11626288 | Integrated contact silicide with tunable work functions | Raymond Hung, Michael Haverty | 2023-04-11 |
| 11615984 | Method of dielectric material fill and treatment | Shi YOU, He Ren, Naomi Yoshida, Nikolaos Bekiaris, Martin Jay Seamons +2 more | 2023-03-28 |