Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705366 | Methods for controllable metal and barrier-liner recess | He Ren, Amrita B. Mullick, Mehul Naik, Uday Mitra | 2023-07-18 |
| 11621172 | Vapor phase thermal etch solutions for metal oxo photoresists | Lakmal C. Kalutarage, Mark Saly, Bhaskar Jyoti Bhuyan, Madhur Sachan | 2023-04-04 |
| 11562904 | Deposition of semiconductor integration films | Lakmal C. Kalutarage, Mark Saly, Bhaskar Jyoti Bhuyan, Thomas Knisley, Kelvin Chan +3 more | 2023-01-24 |