Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11621172 | Vapor phase thermal etch solutions for metal oxo photoresists | Lakmal C. Kalutarage, Mark Saly, Bhaskar Jyoti Bhuyan, Regina Freed | 2023-04-04 |
| 11562904 | Deposition of semiconductor integration films | Lakmal C. Kalutarage, Mark Saly, Bhaskar Jyoti Bhuyan, Thomas Knisley, Kelvin Chan +3 more | 2023-01-24 |