Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11781218 | Defect free germanium oxide gap fill | Huiyuan Wang, Takehito Koshizawa, Bo Qi, Abhijit Basu Mallick | 2023-10-10 |
| 11594415 | PECVD tungsten containing hardmask films and methods of making | Pramit Manna, Rui Cheng, Abhijit Basu Mallick | 2023-02-28 |