Issued Patents 2023
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842897 | High density carbon films for patterning applications | Samuel E. Gottheim, Pramit Manna, Abhijit Basu Mallick | 2023-12-12 |
| 11784042 | Carbon hard masks for patterning applications and methods related thereto | Yang Yang, Pramit Manna, Kartik Ramaswamy, Takehito Koshizawa, Abhijit Basu Mallick | 2023-10-10 |
| 11676858 | High bias deposition of high quality gapfill | Samuel E. Gottheim, Pramit Manna, Abhijit Basu Mallick | 2023-06-13 |
| 11638374 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Nancy Fung +2 more | 2023-04-25 |
| 11621160 | Doped and undoped vanadium oxides for low-k spacer applications | Srinivas Gandikota, Kelvin Chan, Atashi Basu, Abhijit Basu Mallick | 2023-04-04 |
| 11603591 | Pulsed plasma (DC/RF) deposition of high quality C films for patterning | Yang Yang, Pramit Manna, Kartik Ramaswamy, Takehito Koshizawa, Abhijit Basu Mallick | 2023-03-14 |
| 11594416 | Tribological properties of diamond films | Vicknesh Sahmuganathan, Jiteng Gu, Kian Ping Loh, Abhijit Basu Mallick, John Sudijono +1 more | 2023-02-28 |
| 11587764 | Magnetic housing systems | Srinivas Gandikota, Tza-Jing Gung, Samuel E. Gottheim, Timothy Joseph Franklin, Pramit Manna +3 more | 2023-02-21 |
| 11560626 | Substrate processing chamber | Timothy Joseph Franklin, Adam J. Fischbach, Edward Haywood, Abhijit Basu Mallick, Pramit Manna +2 more | 2023-01-24 |
| 11557466 | Tuneable uniformity control utilizing rotational magnetic housing | Samuel E. Gottheim, Abhijit Basu Mallick, Pramit Manna, Timothy Joseph Franklin, Edward Haywood +2 more | 2023-01-17 |
| 11557478 | In-situ high power implant to relieve stress of a thin film | Pramit Manna, Abhijit Basu Mallick, Srinivas Gandikota | 2023-01-17 |