Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823871 | Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool | Jozef Kudela, Tsutomu Tanaka, Dmitry A. Dzilno, Avinash Shervegar, Kallol Bera +3 more | 2023-11-21 |
| 11776793 | Plasma source with ceramic electrode plate | Robert B. Moore, Jared Ahmad Lee, Marc Shull, Tsutomu Tanaka, Dmitry A. Dzilno | 2023-10-03 |