Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776805 | Selective oxidation and simplified pre-clean | Bencherki Mebarki, Joung Joo Lee, Yi Xu, Yu Lei, Xianmin Tang +2 more | 2023-10-03 |
| 11756784 | Methods for aluminum oxide surface recovery | Carmen Leal Cervantes, Xiangjin Xie | 2023-09-12 |
| 11692262 | EM source for enhanced plasma control | Keith A. Miller, Prashanth Kothnur, Martin Lee Riker, David Gunther, Emily Schooley | 2023-07-04 |