Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835927 | Reducing substrate surface scratching using machine learning | Kartik Shah, Satish Radhakrishnan, Karthik Ramanathan, Adolph Miller Allen, Xinyuan Chong +5 more | 2023-12-05 |
| 11810766 | Protection of aluminum process chamber components | Sathyanarayana Bindiganavale, Rajasekhar PATIBANDLA, Balamurugan Ramasamy, Kartik Shah, Umesh M. Kelkar +3 more | 2023-11-07 |
| 11591689 | Method for fabricating chamber parts | Mats Larsson, Kevin A. PAPKE, Chirag Shaileshbhai KHAIRNAR, Rajasekhar PATIBANDLA, Balamurugan Ramasamy +2 more | 2023-02-28 |
| 11586160 | Reducing substrate surface scratching using machine learning | Kartik Shah, Satish Radhakrishnan, Karthik Ramanathan, Adolph Miller Allen, Xinyuan Chong +5 more | 2023-02-21 |