Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810766 | Protection of aluminum process chamber components | Karthikeyan Balaraman, Sathyanarayana Bindiganavale, Rajasekhar PATIBANDLA, Balamurugan Ramasamy, Kartik Shah +3 more | 2023-11-07 |
| 11591689 | Method for fabricating chamber parts | Mats Larsson, Chirag Shaileshbhai KHAIRNAR, Rajasekhar PATIBANDLA, Karthikeyan Balaraman, Balamurugan Ramasamy +2 more | 2023-02-28 |