Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854911 | Methods, systems, and apparatus for conducting chucking operations using an adjusted chucking voltage if a process shift occurs | Matthew Boyd | 2023-12-26 |
| 11769683 | Chamber component with protective ceramic coating containing yttrium, aluminum and oxygen | Vijay D. Parkhe, Teng-Fang Kuo, Zhenwen Ding | 2023-09-26 |
| 11699611 | Forming mesas on an electrostatic chuck | Stanley Wu, Matthew Boyd | 2023-07-11 |
| 11676802 | Substrate support with real time force and film stress control | Govinda Raj, Matthew J. Busche | 2023-06-13 |
| 11648639 | Polishing jig assembly for a new or refurbished electrostatic chuck | William M. Lu, Stacy Meyer | 2023-05-16 |