Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676802 | Substrate support with real time force and film stress control | Wendell Glenn Boyd, Jr., Govinda Raj | 2023-06-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676802 | Substrate support with real time force and film stress control | Wendell Glenn Boyd, Jr., Govinda Raj | 2023-06-13 |