Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854911 | Methods, systems, and apparatus for conducting chucking operations using an adjusted chucking voltage if a process shift occurs | Wendell Glenn Boyd, Jr. | 2023-12-26 |
| 11699611 | Forming mesas on an electrostatic chuck | Wendell Glenn Boyd, Jr., Stanley Wu | 2023-07-11 |