Issued Patents 2023
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11773479 | Plasma erosion resistant thin film coating for high temperature application | Vahid Firouzdor, Jennifer Y. Sun, Martin Jeff Salinas, Jared Ahmad Lee | 2023-10-03 |
| 11724353 | Chamber components with polished internal apertures | Jennifer Y. Sun, Vahid Firouzdor, David Koonce | 2023-08-15 |
| 11680308 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho | 2023-06-20 |
| 11587771 | Chemistry compatible coating material for advanced device on-wafer particle performance | Jennifer Y. Sun, Dmitry Lubomirsky | 2023-02-21 |
| 11578398 | Plasma spray coating design using phase and stress control | Jennifer Y. Sun, Yikai Chen | 2023-02-14 |
| 11566317 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11566319 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11566318 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |